The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a … Radial Line Slot Antennas | SpringerLink Sep 16, 2016 · Linearly polarized arrays are also provided by changing slot array arrangement. The feeding structures are given by a coaxial probe and cavity resonators, which is presented in detail. The applications of radial line slot antennas are satellite communication antenna, plasma etching, and high power use. This chapter also describes these Research - 東京工業大学
Abstract: The near field distributions in radial line slot antennas (RLSA) for surface wave coupled plasma (SWP) are examined. The RLSA are suitable for uniform, high density and large-area plasma generation. In order to realize higher productivity, quick evacuation of reaction gas a narrow gap process space is highly required.
Research - 東京工業大学 Our research themes are planar slotted waveguide antennas and electromagnetic theory. Plasma Etching. ... collaboration with TOKYO ELECTRON (TEL) SSPS * *SSPS: Space Solar Power System. A Radial Line Slot Antenna Fed by a Rectangular Waveguide through a Crossed Slot (5.8GHz, 23dBi, 300W) collaboration with IHI and Kyoto University. Large-area plasma excitation in densely arrayed radial A novel feeding structure using a TE11 (transverse electric) rotating mode in a radial line slot antenna for plasma production is proposed. Moreover, novel slot patterns with different coupling slot distributions are fabricated and tested. Extremely uniform plasma over a large diameter is observed and the possibility of control of the plasma distribution in the radial direction by changing to 'HVLJQRI5DGLDO/LQH6ORW$QWHQQDVDW *+]IRU /DUJH
A radial line slot antenna (RLSA) is a nonresonant multimode waveguide slotted array. To improve the power handing capacity, we design a radial line slow wave structure which replaces a
Low sidelobes for radial line slot antennas. A New Improvement of Radial Line Slot Antenna A radial line slot antenna (CP-RLSA) is a slotted waveguide planar array for DBS reception. A number of designs have been devised, but these[3] Makoto Ando , Kimio Sakural, and Naohisa Gtoto, Characteristics of a Radial Line Slot Antenna for 12 GHz Band Satellite TV Reception, IEEE... Antenna (radio) - Wikipedia
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Плазменная антенна — активно разрабатываемый тип радиоантенн, в которых вместо металлических проводников для приёма и передачи радиоволн используется ионизированный газ — плазма. A Radial Line Slot Antenna for an Elliptical Beam A radial line slot antenna (RLSA) with a quasi-elliptical aperture to create an elliptical beam is discussed in this paper. A simple feeding structure consisting of a coaxial feeder and two parasitic pins is designed to produce the feed pattern required for uniform illumination over the aperture. ...
Sep 15, 2015 ... Results showed that, a uniform line-shaped plasma is generated as waveguide ... gas through slot-antenna, is suitable for large area plasma generation ..... radial plasma density profiles in low-pressure surface wave plasma ...
Because it radiates only into the space above the ground plane, or half the space of a dipole antenna, a monopole antenna will have a gain of twice (3 dB greater than) the gain of a similar dipole antenna, and a radiation resistance half … Akriti PDF Thesis | Antenna (Radio) | Electromagnetic Radiation Akriti PDF Thesis - Free download as PDF File (.pdf), Text File (.txt) or read online for free. hhfw antenna straps: Topics by WorldWideScience.org
Computational modeling study of the radial line slot antenna ... The radial line slot antenna plasma source is a high-density microwave plasma source comprising a high electron temperature source region within the plasma skin depth from a coupling window and low electron temperature diffusion region far from the window.